Thin-film Materials
Sputtering Targets
- By using more than 50 chemical elements, SOLAR is experienced in manufacturing sputtering targets made from over 3,000 alloys and 30 types of metal oxides.
- SOLAR supplies thin films to various industries, such as data storage media, semiconductors and displays. Depending on the application, we can provide sputtering targets in various shapes and sizes.
- SOLAR supplied sputtering targets, which come in various specifications.
- for Data Storage Media Industry
- for Semiconductor Industry
- for Optoelectronic and Display Industry
- Other Sputtering Targets
SOLAR is a world-class supplier of sputtering targets for storage media, providing sputtering targets for all media layers in this industry. SOLAR continuously improves product development capability to help customers pursue higher storage performance.
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MDS Sputtering Target
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ODS Sputtering Target
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SOLAR's semiconductor-grade sputtering targets are supplied to wafer foundries, bumping and packaging/testing. Certified by major international vendors, our products feature both high purity and high precision.
| Application | Products |
|---|---|
| Interconnection layer | Al, Cu or alloy targets |
| Electrode/Metallization layer | Au, Ag, Pt, Ti sputtering targets |
| Barrier layer | Ta, Ti, WTi sputtering targets |
| Gate Electrode | NiPt alloy targets |
| Memory | Ru, CoFe alloy targets |
SOLAR provides planar or rotary sputtering targets with high purity, high density, large size and a high bonding rate. In addition to providing ITO/Mo/Al sputtering targets, we offer a series of transparent conductive oxide (IXO) products to match various optoelectronic properties.
| Application | Product |
|---|---|
| TCO layer | ITO, IXO, In2O3, ZnO planar or rotary sputtering targets |
| Channel layer | IGZO planar or rotary sputtering targets |
| Reflection layer | Ag or Ag alloy targets |
| Anti-reflection layer | Nb2O5, TiO2, Ta2O5, Si sputtering targets |
| Electrode layer | Al, Cu, Mo, Au, Ag or alloy targets |
| Barrier layer | Pt or Pt alloy targets |
| Customized function layer | Pure metal, metal alloy or metal oxide sputtering targets |
With the capability in material design and process development, we can offer customized service to meet your requirements.
- Gold target have passed ISO 10993-5 medical devices vitro cytotoxicity of biocompatibility test.
