Precision Machining Parts
Precision Machining Parts
With years of experience in precision machining, combined with the proficiency in metallurgy, modularization and assembly, engineering application and semiconductor inspection, SOLAR is able to manufacture spare parts for semiconductor equipment.
- In the semiconductor field, we provide equipment consumables specifically for four major processes – Electrochemical Deposition (ECD), Dry Etching, Ion Implanting and Physical Vapor Deposition (PVD).
- Our materials types from silicon, quartz, ceramic to other metal materials, such as gold, silver, platinum, palladium, tantalum, titanium, aluminum, copper, nickel, SUS and PEEK.
- Spare parts can be customized according to client requirements.
| Equipment | List of Parts |
|---|---|
| ECD | 1. Probe POT Potentiostatic Copper (Cu) 2. POT Cable Kit (Cu) 2. Titanium Fastener 3. Wafer Contact Ring |
| Etching | 1. Insert Ring, Si Ring 2. RF Gasket |
| Ion Implanter | 1. Ta Parts 2. Ag Parts 3. NiFe Parts 4. PEEK Insert Ring 5. Graphite Parts |
| PVD | 1. Ta Coil 2. SUS Clamp |
