Precision Machining Parts

Precision Machining Parts

With years of experience in precision machining, combined with the proficiency in metallurgy, modularization and assembly, engineering application and semiconductor inspection, SOLAR is able to manufacture spare parts for semiconductor equipment.
 
  • In the semiconductor field, we provide equipment consumables specifically for four major processes – Electrochemical Deposition (ECD), Dry Etching, Ion Implanting and Physical Vapor Deposition (PVD). 
 
  • Our materials types from silicon, quartz, ceramic to other metal materials, such as gold, silver, platinum, palladium, tantalum, titanium, aluminum, copper, nickel, SUS and PEEK.
 
  • Spare parts can be customized according to client requirements.
 
Equipment List of Parts
ECD 1. Probe POT Potentiostatic Copper (Cu)
2. POT Cable Kit (Cu)
2. Titanium Fastener
3. Wafer Contact Ring
Etching 1. Insert Ring, Si Ring
2. RF Gasket
Ion Implanter 1. Ta Parts
2. Ag Parts
3. NiFe Parts
4. PEEK Insert Ring
5. Graphite Parts
PVD 1. Ta Coil
2. SUS Clamp

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